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MKS Instruments 626A01TDE Pressure Sensor, Range 133.32Pa

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The MKS Instruments 626A01TDE is a high precision vacuum gauge module designed for applications requiring accurate measurement of pressures in the range of 133.32 Pa (1 x 10^-3 Torr), essential for semiconductor manufacturing, research laboratories, and industrial vacuum systems.

Sensor Type:Capacitive

Pressure Range (Pa):133.32

Operating Temperature (°C):-40 to +150

Accuracy (%F.S.):+/-0.1%

Output Signal (V):0.5 to 4.5

Process Connection (mm):1/4 NPT

Electrical Connection:2-wire

    The MKS Instruments 626A01TDE vacuum gauge module is engineered for industries where precision and reliability are paramount. It features an advanced sensor that ensures accurate readings across its wide operating range, making it suitable for various applications including semiconductor fabrication, analytical chemistry, and environmental monitoring.

    With its quick response time and low power consumption, this module is energy-efficient and responsive, capable of adapting to rapid changes in pressure conditions without compromising on accuracy.

    Crafted from corrosion-resistant stainless steel, the module is built to withstand harsh environments, ensuring longevity and maintenance-free operation over extended periods.

    Equipped with both RS232 and RS485 connectivity options, it offers flexibility in integration with different systems, facilitating seamless data transfer and compatibility with existing infrastructure.

    Operational within a broad temperature range (-40°C to +70°C), the MKS Instruments 626A01TDE vacuum gauge module is versatile enough for both laboratory settings and field applications. Its compact design (150mm x 76mm x 32mm) and lightweight (approximately 0.2 kg) make it easy to install and integrate into existing systems.

MKS 626A01TDE RANGE 133.32Pa




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